کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1488325 1510717 2014 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Diffusion length and resistivity distribution characteristics of silicon wafer by photoluminescence
ترجمه فارسی عنوان
خصوصیات توزیع طول و مقاومت توزیع ویفر سیلیکون توسط فوتولومینسانس
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
چکیده انگلیسی


• Analytical photoluminescence efficiency calculation and PL intensity ratio method are developed.
• Wafer resistivity and diffusion length characteristics are investigated by PL intensity ratio.
• PL intensity is well correlated with resistivity, diffusion length or defect density on wafer measurement.

Photoluminescence is a convenient, contactless method to characterize semiconductors. Its use for room-temperature silicon characterization has only recently been implemented. We have developed the PL efficiency theory as a function of substrate doping densities, bulk trap density, photon flux density, and reflectance and compared it with experimental data initially for bulk Si wafers. New developed PL intensity ratio method is able to predict the silicon wafer properties, such as doping densities, minority carrier diffusion length and bulk trap density.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Research Bulletin - Volume 58, October 2014, Pages 157–163
نویسندگان
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