Structural and optical characterization of Ba0.8Sr0.2TiO3 PLD deposited films

Structural and optical properties of Ba0.8Sr0.2TiO3(BST) ferroelectric thin films, deposited by the pulsed laser ablation (PLD) technique on Si/SiO2/Ti/Pt, Si/SrRuO3 and Si substrates, were performed by X-ray diffraction, micro Raman, atomic force microscopy (AFM), and optical reflectometry measurements. Temperature dependences of the Raman spectrum, and room temperature refractive and extinction indices, and surface roughness were evaluated.