کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1505597 993767 2011 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering
چکیده انگلیسی

Cubic nickel oxide (bunsenite) films were deposited on glass substrates by dc reactive magnetron sputtering technique at different sputtering powers. The influence of sputtering power on structural, compositional, optical, and electrical properties of the as deposited films were investigated. The XRD results revealed that the orientation of the NiO films was changed from (200) to (220) with increasing the sputtering power. The crystallinity of the films was also increased with sputtering power. The optical transmittance of NiO films in the visible spectrum was increased up to a sputtering power of 150 W and then decreased slightly at higher sputtering powers. The low electrical resistivity the NiO films was about 5.1 Ω cm at a sputtering power of 150 W.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid State Sciences - Volume 13, Issue 2, February 2011, Pages 314–320
نویسندگان
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