Laser-fluence effects on NbNx thin films fabricated by pulsed laser deposition

► Niobium nitride films were deposited using pulsed laser deposition (PLD) onto Nb substrates with varying laser fluences. ► The nitrogen content in NbNx layers is found to be increasing with higher laser fluences up to 15 J cm−2 and decrease thereafter. ► The films exhibit highly textured structure with a preferential orientation of (1 1 0) planes. ► The mixed phase in NbNx layers and the ratio of hexagonal phase to cubic phase is dependent on the laser fluence.