کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1536494 | 996568 | 2012 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Optical surface profile measurement using phase retrieval by tuning the illumination wavelength
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Optical surface profile measurement using phase retrieval by tuning the illumination wavelength Optical surface profile measurement using phase retrieval by tuning the illumination wavelength](/preview/png/1536494.png)
چکیده انگلیسی
In this paper, we present a method for measuring the surface profile of an object by using diffraction intensity patterns recorded at different illumination wavelengths. The main advantages of this technique are: simple optical set-up, high immunity to noise and environmental disturbance, since no reference beam (like in holography) or additional moving parts are needed. Two iterative calculations are synchronously performed using two sequences of diffraction intensity patterns, producing fast convergence to the expected result. The effects of different parameters on the accuracy and efficiency of the method are investigated. Simulation and experimental results are presented.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 285, Issue 24, 1 November 2012, Pages 5029–5036
Journal: Optics Communications - Volume 285, Issue 24, 1 November 2012, Pages 5029–5036
نویسندگان
Peng Bao, Giancarlo Pedrini, Wolfgang Osten,