Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

► We conducted FE analysis of the dynamic behavior of monolithic piezoelectric micro-mirror. ► Induced residual stress exhibited significance influence on the dynamic behavior of micro-mirror. ► Computed eigenfrequencies increased with increasing the thickness of Si layer. ► Fundamental (flexural) eigenfrequencies increased (decreased) with increasing PZT film thickness. ► FE modeling can serve as an effective tool to a priori predict the dynamic behavior of micro-mirror.