Post-irradiation effect of Deuterium ion beam onto Rh/W/Cu multilayer thin film

The fabrication of mirror like multilayer Rh/W/Cu thin films via Pulsed Laser Deposition technique is reported in this paper. These multilayer thin film mirrors were irradiated to 10, 20 and 30 keV energy of Deuterium ion beam. The post-irradiation effects onto the quality of these thin films were investigated by subjecting them to X-ray Diffractometer, Scanning Electron Microscope, Atomic Force Microscope, Ultraviolet (UV)–Visible and Far Infrared (FIR) spectrometer.

AFM images of M1 and M2 Rh/W/Cu multilayer samples are in Fig. (a and b) before D ion beam irradiation and that of after 20 keV and 30 keV D ion beam irradiation are in Fig. (c and d), respectively. The columnar structures observed in the AFM images before and after irradiation were intact. The RMS roughness of the films increased by ∼4 nm due to 20 keV and ∼3 nm due to 30 keV D ion beam irradiation.Figure optionsDownload as PowerPoint slide