He+ irradiation temperature influence on the structure and nanohardness of hydrocarbon films

Polymer-like hydrocarbon films were irradiated with 100 keV He+ or annealed at sample temperatures varying from 25 to 600 °C. The effects of sample temperature on the structure and nanohardness of hydrocarbon films are investigated by atomic force microscopy (AFM), AFM-based nanoindentation, Fourier transform infrared spectroscopy, and Raman spectroscopy. Analysis shows that annealing results in the decrease in the nanohardness of hydrocarbon films from 4.0 GPa to 0.55 GPa while He+ irradiation at an elevated sample temperature results in the formation of dense diamond-like carbon films with nanohardness up to 20.0 GPa. This indicates that polymer-like hydrocarbon films can be transformed into the hard diamond-like carbon films with a relatively low H content on vacuum vessels of fusion devices due to the energetic bombardments at an elevated wall temperature.