Factors governing the mechanical behaviour of CrSiN coatings: Combined nanoindentation testing and transmission electron microscopy

► Influence of Si in CrSiN coatings on microstructure and mechanical behaviour. ► XTEM observation of microstructure before and after nanoindentation. ► Microstructure, residual stress, hardness are affected by Si content. ► Deformation mechanisms operated in the coatings explain their mechanical behaviour.