کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1589076 | 1515158 | 2014 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM](/preview/png/1589076.png)
چکیده انگلیسی
The potential of X-ray nanotomography hosted in a SEM in presented in this paper. In order to improve the detail detectability of this system, which is directly related to the X-ray source size, thin metal layers have been studied and installed in the equipment. A 3D resolution pattern has been created in order to determine the smallest detectable features by this setup. This sample is a 25 μm diameter copper pillar in which size-controlled holes have been milled using a plasma-focused ion beam. This pattern has then been scanned and the resulting 3D reconstruction demonstrates that the instrument is able to detect 500 nm diameter voids in a copper interconnection, as used in 3D integration.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Micron - Volume 58, March 2014, Pages 1-8
Journal: Micron - Volume 58, March 2014, Pages 1-8
نویسندگان
D. Laloum, F. Lorut, J. Bertheau, G. Audoit, P. Bleuet,