Localization factor: A new parameter for the quantitative characterization of surface structure with atomic force microscopy (AFM)

► In this work we introduce a new parameter called localization factor. ► This parameter is applied for the characterization of contact-AFM images. ► The application of this parameter is beneficial in areas which require information about the surface structure. ► AFM images obtained on different gold thin film surfaces were evaluated. ► The localization factor was compared with the surface roughness and roughness factor.