کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1605469 | 1516210 | 2016 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nitrogen incorporation and composition facilitated tailoring of the optical constants and dispersion energy parameters of tungsten oxynitride films
ترجمه فارسی عنوان
ترکیب و ترکیب نیتروژن باعث تسهیل خیاطی از ثابت های نوری و پارامترهای انرژی پراکندگی در فیلم های اکسینیرید تنگستن
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
چکیده انگلیسی
Optical properties, including the index of refraction, extinction coefficient and band gap of 100 nm thick tungsten oxynitride (W-O-N) films are reported. In addition, the Wemple and DiDomenico (WDD) model was used to calculate the dispersion energies and oscillator energies of the films, establishing a correlation among the films' optical, chemical, and physical properties, as a function of nitrogen content. Nitrogen concentration in the W-O-N films was varied by adjusting the nitrogen gas flow rate from 0 to 20 sccm while keeping total gas flow (nitrogen + oxygen + argon) constant at 40 sccm. Both the index of refraction (n) and extinction coefficient (k) of W-O-N films demonstrated a high degree of sensitivity to the nitrogen content during deposition. The optical constants of films fabricated without any nitrogen correspond to transparent W-oxide (WO3) where n550 = 2.1 and k550 = 0.0. The magnitude of the spectral response for both n and k tends to increase with increasing nitrogen content. Systematic increases of the films' nitrogen content lead to the formation of W-oxide (Eg â 3 eV) â W-O-N oxynitride semiconductor (Eg â 2 eV) â N-rich W-O-N semi-metal (Eg < 2 eV) â WN2 type metallic transition was evident in dispersion profiles of n and k for W-O-N films with increasing nitrogen content. The corresponding mechanical characteristics, namely hardness (H) and Young's modulus (E), attain a maximum of 4.46 GPa and 98.5 GPa, respectively, at a nitrogen flow rate of 5 sccm, at which point H and E values decrease to attain 3.57 GPa and 72.91 GPa, respectively. The trend observed in H and E values correlate with the W-O and W-N bonds formation in W-O-N along with the interruption of local epitaxy attributed to increasing nitrogen content within the growth chamber. A correlation among the nitrogen content, optical constants and physical properties, along with the associated dispersion model, is presented to account for the optical properties of sputter-deposited W-O-N films. The results demonstrate that tailoring the properties of W-O-N films for desired applications can be achieved by tuning the nitrogen content and chemical composition.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 683, 25 October 2016, Pages 292-301
Journal: Journal of Alloys and Compounds - Volume 683, 25 October 2016, Pages 292-301
نویسندگان
O.R. Nunez, A.J. Moreno Tarango, N.R. Murphy, C.V. Ramana,