Influence of substrate temperature on high-frequency soft magnetic properties of [Fe80Ni20-O/NiZn-ferrite]n multilayer thin films

In this research, a series of [Fe80Ni20-O/NiZn-ferrite]n multilayer thin films were prepared by magnetron sputtering at different substrate temperatures. The influences of NiZn-ferrite interlayer and substrate temperature on high-frequency soft magnetic properties of [Fe80Ni20-O/NiZn-ferrite]n multilayer thin films were investigated. It was found that the saturation magnetization was highly dependent on the substrate temperature during the sputtering procedure. By increasing the substrate temperature from room temperature to 300 °C, the saturation magnetization increased from 7.34 kG to maximum of 9.26 kG at 150 °C, and then decreased to 6.53 kG at 300 °C. The adjustment of substrate temperature is essential to obtain the low coercivity, high permeability and controllable in-plane uniaxial magnetic anisotropy field of the multilayer thin films.