Microstructural and functional stability of large-scale SnO2:F thin film with micro-nano structure

► The large-scale uniform SnO2:F film was prepared by APCVD on an industrial line. ► The SnO2:F film presented a micro-nano structure. ► The film showed uniform morphology and stable functional property under 580 °C. ► 'H' factor was defined to quantify the structural influence on the low-e property.