Microstructure and magnetic properties of Ni3Fe solid solution thin films deposited by DC-magnetron sputtering

Fe–Ni thin films were co-sputter deposited from Ni and Fe metallic targets on different substrates. The evolution of the coating composition as a function of the discharge current dissipated on each target is studied and the targeted composition for Ni3Fe is obtained by fixing the discharge current applied on Fe target at 0.5 A and adjusting the discharge current applied on Ni target at 0.45 A. The as deposited coating with convenient composition presents a disordered solid solution FCC structure. Finally, the magnetic properties of the films are investigated as a function of their thickness. We have observed that coercivity decreases slightly and magnetic moment increases which increasing film thickness.

► Ni–Fe coatings are deposited by DC-magnetron sputtering of Ni and Fe metallic targets.
► Coatings structures and compositions are verified versus current intensity applied on each targets.
► With adjustment of electrical parameters, Ni3Fe thin film is obtained.
► Magnetic properties of Ni3Fe thin films are measured as a function of layer thickness and grain size.