Effects of S on solid solubility of Ag and electrical properties of Ag-doped ZnO films grown by radio frequency magnetron sputtering

► Ag-S codoped p-type ZnO films were obtained by RF magnetron sputtering. ► S alloying in ZnO can increase solid solubility of substitutional Ag acceptor. ► S alloying in ZnO produces shallower AgZn-nSO acceptor than AgZn acceptor. ► The AgZn-nSO acceptor is more easily formed than AgZn acceptor. ► The AgZn-nSO acceptor is responsible for p-type conductivity.