Optical properties of aluminum silver alloy films deposited by magnetron sputtering

► Thin films of Al-10 wt.% Ag were deposited onto silicon substrates by DC magnetron sputtering. ► We studied the effect of annealing on the structure and optical properties of Ag-10 wt.% Al alloy films. ► VASE was employed to characterize the dielectric functions of the silver aluminum alloy films. ► Al-10 wt.% Ag alloy films with different annealing temperature is a material for plasmonics and metamaterials.