کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1615221 1516346 2013 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low dimensional fabrication of giant dielectric CaCu3Ti4O12 through soft e-beam lithography
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
Low dimensional fabrication of giant dielectric CaCu3Ti4O12 through soft e-beam lithography
چکیده انگلیسی

We report low-dimensional fabrication of technologically important giant dielectric material CaCu3Ti4O12 (CCTO) using soft electron beam lithographic technique. Sol–gel precursor solution of CCTO was prepared using inorganic metal nitrates and Ti-isopropoxide. Employing the prepared precursor solution and e-beam lithographically fabricated resist mask CCTO dots with ∼200 nm characteristic dimension were fabricated on platinized Si (1 1 1) substrate. Phase formation, chemical purity and crystalline nature of fabricated low dimensional structures were investigated with X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDS) and selected area electron diffraction (SAED), respectively. Morphological investigations were carried out with the help of scanning electron microscopy (SEM) and transmission electron microscopy (TEM). This kind of solution based fabrication of patterned low-dimensional high dielectric architectures might get potential significance for cost-effective technological applications.


► Giant dielectric CaCu3Ti4O12 is structured for the first time down to nanoscale.
► A soft-lithographic “bottom-up” approaches is employed.
► The nanostructures were thoroughly characterized, both structurally and chemically.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 547, 15 January 2013, Pages 147–151
نویسندگان
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