کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1615877 | 1005644 | 2012 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2 blend Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2 blend](/preview/png/1615877.png)
As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.
► Perturbed angular correlations and X-ray diffraction studies in equimolar Si-HfO2.
► Mixture subjected to progressive mechanical milling and a final annealing.
► Short milling distorts monoclinic hafnia to tetragonal forms.
► Long milling forms hafnon precursor.
► Moderate temperature annealing ends in hafnon.
Journal: Journal of Alloys and Compounds - Volume 536, Supplement 1, 25 September 2012, Pages S50–S54