Microstructural characterization of hydrophobic Ti1−xAlxN coatings with moth-eye-like surface morphology

► Moth-eye-like structures were obtained by changing the power supplied to the targets at a constant N2 pressure. ► The antireflecting properties and hydrophobicity of the coatings are discussed. ► HREM and related techniques revealed the formation of meso- and nano-columns and different degree of open porosity.