Preparation and sorption characteristics of Zr–Co–RE getter films

In order to study the sorption characteristics of Zr–Co–RE (RE indicating rare earth element) thin films, Zr–Co–RE films were prepared by RF magnetron sputtering from an alloy target. Sorption characteristics depending on layered structures, activation procedures and substrate roughness were investigated. The studies reveal that Zr–Co–RE films can be activated at low temperature with the modification of microstructures. Tri-layered films exhibit more favorable sorption capability than the single-layered film. Sorption properties can be improved by optimizing activation parameters (time or temperature) and deposition on coarse substrates. Rough films with larger specific surface area exhibit extremely sustainable sorption speed and large sorption capacity. The sorption capacity of Zr–Co–RE rough film was also calculated by the fitting formula between sorption speed and sorption quantity.

► Zr–Co–RE thin films were prepared by RF magnetron sputtering.
► Zr–Co–RE alloy as the target.
► Low temperature activation treatment modifies the film microstructure and enables H2 sorption capability.
► Optimizing activation time or temperature improves sorption capability.
► Rough films exhibit stable sorption properties.