Electric and dielectric behavior of CaCu3Ti4O12-based thin films obtained by soft chemical method

► We prepare stoichiometric and non-stoichiometric CCTO thin films by the soft chemical method. ► We study the electrical and dielectric properties as a function the annealing temperature. ► These properties are markedly affected by the annealing temperature and excess calcium. ► CCTO thin films present a resistive switching behavior.