Surface and in-depth characterization of InGaN compounds synthesized by plasma-assisted molecular beam epitaxy

InGaN layers with multiple quantum wells are widely used as active layers in advanced optoelectronic devices. In the present work, surface properties of some InGaN layers grown on GaN/sapphire substrates by plasma-assisted molecular beam epitaxy were examined. The total indium content incorporated in the crystalline lattice of In0.165Ga0.835N and In0.353Ga0.647N layers grown with a thickness of 70–200 nm was controlled by the growth temperature, and was determined from X-ray diffraction. Auger electron spectroscopy and X-ray photoelectron spectroscopy analysis reveal relatively smaller concentration of In within the surface area than in the bulk of the InGaN layers. The Ar+ XPS depth profile analysis shows the thick InGaN layers to be chemically homogeneous within an analytical area. To determine the electron inelastic mean free path in the layers within the 500–2000 eV range, relative elastic-peak electron spectroscopy measurements with Ni and Au standards were performed. The measured IMFPs were considerably larger than those predicted from the TPP-2M formula. The smallest root-mean-square-deviation and the mean percentage deviation of 9.9 Å and 44.5%, respectively, were found between EPES IMFP data and those predicted for the In0.353Ga0.647N layer with respect to the Au standard. This work provided the detailed compositional and chemical changes of InGaN thick layers, and could be useful in solving key issues associated with the growth of high-quality layer with much higher In content.

► InGaN layers on GaN/sapphire substrates.
► In concentration is smaller on the as-grown InGaN surface than in the bulk.
► Formation of Ga-rich InGaN surfaces under Ar-ion sputtering.
► InGaN layers are found to be homogeneous layers.
► Measured IMFPs for InGaN are larger than those calculated theoretically.