کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1617215 1005681 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of buffer layer annealing temperature on the crystalline quality of In0.82Ga0.18As layers grown by two-step growth method
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
Effect of buffer layer annealing temperature on the crystalline quality of In0.82Ga0.18As layers grown by two-step growth method
چکیده انگلیسی

In0.82Ga0.18As epilayers were grown by LP-MOCVD on InP substrates with the insertion of In0.82Ga0.18As buffer layers, which were annealed at various temperatures between 490 °C and 630 °C for 5 min in AsH3 ambient. The effect of buffer layer annealing temperatures on the crystalline quality of In0.82Ga0.18As epilayers was investigated by atomic force microscopy, scanning electron microscopy, double-crystal X-ray diffraction, and room-temperature Hall measurement. The characterization results showed that high quality In0.82Ga0.18As epilayers were obtained by optimizing the annealing temperatures of buffer layers. In particular, the In0.82Ga0.18As epilayer with buffer layer annealed at 530 °C showed the best crystalline quality. The changes of crystalline quality of In0.82Ga0.18As epilayers at high and low annealing temperature can be attributed to the recrystallization and reevaporation of the In0.82Ga0.18As buffer layers.


► The buffer layer was thermal annealed at various temperatures to improve the crystalline quality of In0.82Ga0.18As materials grown by two-step growth method.
► The crystalline quality of In0.82Ga0.18As epilayers is very sensitive to the buffer layer annealing temperatures.
► In our experimental conditions, the In0.82Ga0.18As materials which have good quality and properties can be obtained when the buffer was thermal annealed at 530 °C.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 509, Issue 24, 16 June 2011, Pages 6751–6755
نویسندگان
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