Application of nBu2Sn(acac)2 for the deposition of nanocrystallite SnO2 films: Nucleation, growth and physical properties

► A new cost-efficient precursor of nBu2Sn(acac)2 was applied for the deposition of SnO2 films. ► The study of volatility and stability of nBu2Sn(acac)2 indicates the good adaptability for the CVD process. ► The different variation of the nucleation and growth rates with the deposition temperature is proposed to explain the observed unusual change of crystallite size. ► A systematic study of physical properties of as-deposited SnO2 was conducted considering the effect of deposition temperature.