Effects of Ag nanoshape and AgGa phase in Ag-Si nanostructure using 2-step etching process

▶ In order to connect biotechnology and semiconductor fabrication, the two step DWE (dry-wet etching, DWE) of Si nanohollow structure needs a development. Because the DWE is a new material process, its mechanism has still not been examined, and in particular the redox reaction and the effect of sidewalls. The present nanostructures and results have been obtained by an advanced method, and 15-30 nm Ag nano-particles were able to enhance the DWE mechanism in the Ag/Si nanostructures.