Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

An industrial scale cathodic arc assisted middle frequency magnetron sputtering system was introduced and Cr–Si–N nanocomposite coatings with various amounts of Si content have been synthesized. Energy dispersive spectroscope, X-ray diffraction, transmission electron microscopy, nanoindentation technique and friction measurement were employed to characterize the microstructure and mechanical properties of the coatings. The microstructure and hardness of the coatings were greatly influenced by the Si content. The nc-CrN/a-Si3N4 structure was formed in the coatings and exhibited a maximum hardness of 39.8 GPa. The surfaces of the samples were smooth and the adhesion between the coating and substrate was higher than 50 N. These properties make it possible for industrial applications.