کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1623373 1516415 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Improvement in the mechanical properties of tin oxide thin films due to vapour chopping
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
Improvement in the mechanical properties of tin oxide thin films due to vapour chopping
چکیده انگلیسی

Vapour chopping technique is successfully used to improve the mechanical properties of tin oxide thin films. The effect of vapour chopping, thickness and oxidation temperature on the adhesion and intrinsic stress of tin oxide thin films is reported. Increase in adhesion and decrease in stress due to increase in thickness and oxidation temperature was observed. Both the vapour chopped and nonchopped films show decrease in adhesion and increase in stress upon exposure to air ageing. The effect of air ageing was found small in vapour chopped films than those in nonchopped films. It is concluded that vapour chopping technique improves the quality of thin film deposits.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 462, Issues 1–2, 25 August 2008, Pages 235–239
نویسندگان
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