Disorder-order phase transformation in sputter deposited Pd3In thin films

Phase transformation in Pd3In thin films has been investigated using transmission electron microscopy (TEM), X-ray diffraction (XRD), and differential scanning calorimetry (DSC). Pd3In films were sputtered onto room temperature substrates and characterized by TEM and XRD as disordered face centered cubic (fcc) structure. Ordered tetragonal structure was observed in the samples annealed up to 550 °C. DSC measurements gave a heat of transformation of 3.25 kJ/mol.