Application of two-dimensional polystyrene arrays in the fabrication of ordered silicon pillars

2D ordered Si-based pillars were fabricated by nanosphere lithography. Polystyrene nanosphere monolayer was deposited onto the silicon substrate by the self-organization technique, which was used as mask in the following RIE process. The polystyrene nanospheres were thinned by oxygen plasma, and thus the radius of silicon pillars can be controlled.