DC magnetron sputtering prepared AgC thin film anode for thin film lithium ion microbatteries

An AgC thin film was prepared by DC magnetron co-sputtering, using pure silver and graphite as the targets. The microstructure and morphology of the deposited thin film were characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). Electrochemical performances of the AgC thin film anode were investigated by means of discharge/charge and cyclic voltammogram (CV) tests in model cells. The electrochemical impedance spectrum (EIS) characteristics and the chemical diffusion coefficient, DLi of the AgC thin film electrode at different discharging states were discussed. It was believed that the excellent cycling performance of the AgC electrode was ascribed to the good conductivity of silver and the volume stability of the thin film.