Fast reversible switching Sb2Te-SiNx films with high thermal stability

SiNx-doped Sb2Te nano-composite phase change material was proposed and investigated. Resistance-temperature measurement and fitting results show that the crystallization temperature and 10-year data retention are largely improved, which promises better thermal stability. X-ray diffraction and transmission electron microscope results prove that the incorporation of SiNx plays a role in suppressing the crystallization of Sb2Te films, which causes smaller grain size. Furthermore, a fast Set/Reset operation of 8 ns and a reversible switching up to 1.2×104 cycles are demonstrated.