Composition-dependent crystallization enhancing moisture-barrier performance in In–Zn–O thin films

• IZO films were deposited on polymer by co-sputtering with various In vs. Zn ratio.
• The crystallinity of the films increased with increasing Zn content.
• The water vapor transmission rate decreased when the film crystallinity increased.

The comparative moisture-barrier performance of amorphous and crystalline inorganic oxide thin films deposited on polymer substrates by sputtering at room temperature is reported using the composition (In vs. Zn ratio)-dependent crystallization in In–Zn–O (IZO) homologous phase. The water vapor transmission rate of IZO thin film decreased by more than an order of magnitude when the crystallinity of the films increased with increasing Zn content. This result suggests that the crystallization can improve the gas-barrier performance in inorganic barrier films.

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