Modified preparation technique of TEM sample for various TEM analyses of structural materials

A modified preparation technique is suggested for fabrication of an experimental TEM sample of structural material. A semicircular titanium grid with a diameter of 3 mm was fabricated instead of a commercial TEM grid for various TEM analyses. Both edges of a pre-fabricated TEM lamella were strongly welded on a rectangular hole at thin edge of the grid to prevent significant bending during additional ion milling. The samples prepared by the modified preparation technique can be used for obtaining of clear TEM images of precipitates and microstructural defects and for observing of the interaction behaviors between defects and dislocation during an in-situ straining TEM examination.

► A damage-free TEM sample is prepared with a focused ion beam device and a low energy Ar ion miller.
► A semicircular titanium TEM grid with a very thin edge is fabricated to minimize redeposition and contamination during ion thinning treatments instead of a commercial TEM grid.
► TEM samples produced by the modified preparation technique can be used for in-situ strain TEM examination as well as classical TEM observation.