کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1646370 | 1517299 | 2012 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure](/preview/png/1646370.png)
Si1−xGex films were epitaxially grown on Si(0 0 1) substrates at various ratios of flow rates of Si2H6 and GeH4. Si1−xGex films were also selectively grown on Si windows through modified alternating gas supply manner, repeating the unit cycle which consists of the Si1−xGex growth step and Cl2 exposure step. Injection of Cl2 enhanced the selectivity of the selective growth of Si1−xGex by etching away the spurious nuclei or deposits formed on oxide area. The separate addition of Cl2 resulted in decrease of the growth rate and Ge concentration of Si1−xGex film. Meanwhile, Ge concentration in Si1−xGex films was insignificantly affected by the variation of the flow rates and exposure durations of Cl2.
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► Selective epitaxial growth of S1−xGex on Si windows.
► Si1−xGex film by consecutively repeating Si1−xGex growth and Cl2 exposure.
► Separate addition of Cl2: decrease of growth rate and Ge concentration.
► Increase in exposure of Cl2: insignificant effects on the Ge concentration.
Journal: Materials Letters - Volume 88, 1 December 2012, Pages 89–92