کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1647240 1517313 2012 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Electron beam induced crystallization of sputter deposited amorphous alumina thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Electron beam induced crystallization of sputter deposited amorphous alumina thin films
چکیده انگلیسی

Crystallization of amorphous alumina (Al2O3) in a thin film capacitor structure was induced by the electron beam of a transmission electron microscope (TEM). The crystallization was initially observed while collecting selected area diffraction (SAD) patterns after 2 min of beam exposure at an accelerating voltage of 200 keV and a beam current density of 13.0 A/cm2. After 16 min of beam exposure, distinct ring patterns associated with crystal growth were evident in the SAD pattern. Bright field and dark field TEM images confirmed that crystallization occurred, with crystals growing up to ~50 nm in diameter.


► Thin film capacitors examined by TEM.
► Amorphous Al2O3 crystallized under 200 keV electron beam at beam current of 13 A/m2.
► Al2O3 crystals reached ~50 nm in diameter after 16 min of beam exposure.
► Crystal growth indicates thermal crystallization process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 74, 1 May 2012, Pages 12–15
نویسندگان
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