Direct amination on 3-dimensional pyrolyzed carbon micropattern surface for DNA detection

Three-dimensional pyrolyzed carbon micropatterns were fabricated by using photolithography and pyrolysis process. Direct amination was achieved by functionalizing its surface with ultraviolet (UV) irradiation under ammonia gas. Quantified amino groups on the carbon surface were estimated by X-ray photoelectron spectroscopy. Hybridization intensity and intensity profile were investigated by epifluorescence microscopy.