The detection of local plastic strain in microscopic scale

The detection and evaluation of plastic deformation in microscopic scale is very important under many circumstances. The conventional optical and scanning-electron microscope (SEM) do not provide crystallographic contrast with sufficient sensitivity. Site-specific transmission-electron microscope (TEM) analyses are usually difficult due to the limited size of the area being analyzed and the difficulties in sample preparation. This paper will demonstrate that small plastically deformed zones can be easily detected using focused-ion beam (FIB) secondary-electron images.