کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1652981 1007653 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Determination of mechanical properties of electroplated Ni thin film using the resonance method
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Determination of mechanical properties of electroplated Ni thin film using the resonance method
چکیده انگلیسی

This paper addresses a relatively simple method of measuring the mechanical properties such as Young's modulus and residual stress of electroplated Ni thin film using the resonance method of Atomic Force Microscope. Thin layer of nickel to be measured is electroplated onto the tip side of AFM silicon cantilever and plating thicknesses were measured at the end of each plating step. The measured Young's modulus of nickel at the end of each plating step ranged from 148.04 GPa to 159.90 GPa with the maximum standard deviation of 3.47. The end deflection of electroplated AFM cantilever is also measured as a function of the plated Ni thickness, which is converted into the film stress by appropriate mechanics.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 61, Issue 17, July 2007, Pages 3589–3592
نویسندگان
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