کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1654706 1517350 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A compensation of Young's modulus in polysilicon structure with discontinuous material distribution
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
A compensation of Young's modulus in polysilicon structure with discontinuous material distribution
چکیده انگلیسی

This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 59, Issues 29–30, December 2005, Pages 3900–3903
نویسندگان
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