Atmospheric pressure plasma enhanced chemical vapor deposition of SiOx films for improved corrosion resistant properties of AZ31 magnesium alloys

This study investigated the feasibility of using atmospheric pressure plasma enhanced chemical vapor deposition (APPECVD) system using tetraethoxysilane (TEOS)/O2 plasma to deposit SiOx films as anti-corrosion layer on the AZ31 magnesium alloys. According to the materials characteristic and electrochemical measurements results, the silicone-like film with higher degree of porosity leaves them susceptible to corroded by 3.5% NaCl solution, as compared to the dense silica-like film with lower degree of porosity.111