کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1657292 1517618 2015 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The critical influence of surface topography on nanoindentation measurements of a-SiC:H films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
The critical influence of surface topography on nanoindentation measurements of a-SiC:H films
چکیده انگلیسی


• A grain structure was revealed at the surface of a-SiC:H films (50–70 W).
• The grains were investigated by nanoindentation measurements.
• Simulation was used to correctly interpret the nanoindentation data.
• The surface topography of grain had a critical influence on nanoindentation.
• Nanoindentation measurements must be performed on strictly flat surfaces.

Hydrogenated amorphous silicon-carbon films were prepared on polished silicon wafers from a tetravinylsilane precursor via plasma-enhanced chemical vapor deposition. The grain structure was developed at the film surface using high powers (50–70 W), as observed by atomic force microscopy (AFM). Conventional and cyclic nanoindentation measurements revealed different mechanical responses for indentation into and outside of the selected isolated grain with a spherical cap geometry with a radius greater than that of the indenter (50 nm). The finite element method was employed to simulate the behavior of the grain under deformation by an indenter to correctly interpret the nanoindentation data. Scanning probe measurements using modulus mapping (dynamic mechanical analysis) and atomic force acoustic microscopy confirmed that the surface topography had a critical influence on the determined mechanical properties, which were significantly underestimated. Our experimental and simulation study demonstrates that nanoindentation and scanning probe measurements must be performed on strictly flat surfaces. This conclusion applies to all AFM measurements performed in contact and semi-contact mode used to characterize mechanical properties based on the geometry of the contact.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 261, 15 January 2015, Pages 114–121
نویسندگان
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