Influences of SiOx layer thickness on the characteristics of In-Zn-O/SiOx/n-Si hetero-junction structure solar cells

► IZO film was deposited on an n-type Si by PLD to form the IZO/SiOx/n-Si hetero-junction SIS solar cell. ► Thickness of the SiOx layer grown by thermal processes affects the performance of SIS solar cell. ► SIS sample containing a 1.78-nm thick SiOx layer exhibited the conversion efficiency of 3.4%.