Structural and mechanical properties of pre-strained transparent conducting oxide films on flexible substrate

► ITO and AZO films are deposited with various pre-strain applied to the substrate. ► Crystalline for ITO and AZO films decrease at a critical pre-strain level. ► When the pre-strain level is over 4%, cracks appear in the ITO thin film. ► AZO film can tolerate more stress than can ITO film.