کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1657875 | 1008313 | 2013 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
VHF SiH4/H2 plasma characteristics with negative ions
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: VHF SiH4/H2 plasma characteristics with negative ions VHF SiH4/H2 plasma characteristics with negative ions](/preview/png/1657875.png)
چکیده انگلیسی
A VHF SiH4/H2 plasma was produced using a multi rod electrode and the plasma parameters were measured using a heated Langmuir probe, where the frequency of the power source was 80 MHz. The Langmuir probe characteristics indicated that when the concentration of SiH4/H2 is increased, negative ions appear and at the same time the electron temperature increases.
► VHF SiH4/H2 plasma was produced using a multi rod electrode of 422 mm × 422 mm.
► The sheath potential was lower than the calculated one for SiH4/H2 of 30%.
► The electron temperature increased to (4–4.5) eV for SiH4/H2 of 30%.
► The probe characteristics indicated the existence of negative ions for 30%.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 228, Supplement 1, 15 August 2013, Pages S433–S436
Journal: Surface and Coatings Technology - Volume 228, Supplement 1, 15 August 2013, Pages S433–S436
نویسندگان
Tsukasa Yamane, Sachiko Nakao, Yoshiaki Takeuchi, Yasuhiro Yamauchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai,