Deposition of Pt and Sn doped CeOx layers on silicon substrate

Radio Frequency Magnetron Sputtering is used to elaborate CeOx layers doped with platinum and/or tin on a SiO2/Si substrate. Morphology, chemical composition and crystallographic structures were investigated by Transmission Electron Microscopy. The presence of nanoparticles of mainly ceria and metallic platinum is exhibited.

► CeOx layers doped with platinum were elaborated by Radio Frequency Magnetron Sputtering.
► Combination of structural analyses (HRTEM, SAED, EDX) was carried out.
► Nanoparticles of mainly ceria and metallic platinum were pointed out.