Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr)100 − xNx

►Films of (AlCrSiTiZr)100 − xNx are prepared by reactive magnetron sputtering. ►Composition, structures, and mechanical properties of the coatings are studied. ►Substrate 6061 Al alloys and mild steel substrates are used. ►Corrosive resistance of the films is examined by polarization curves in 0.1 M H2SO4. ►Film properties and their effects on corrosive resistance are discussed.