Annealing effects in Ag-doped amorphous carbon films deposited by dc magnetron sputtering

► Ag-doped a-C films deposited by dc magnetron sputtering. ► As-deposited C/Ag film consists of Ag nanoparticles embedded in a-C matrix. ► Annealing at 600 °C in vacuum initiates process of Ag particles coalescence. ► The coalescence occurs by diffusion of Ag atoms and collisions of particles.