کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1658677 1008358 2010 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of carbon sputtering power on structure, corrosion resistance, adhesion strength and wear resistance of platinum/ruthenium/nitrogen doped diamond-like carbon thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Influence of carbon sputtering power on structure, corrosion resistance, adhesion strength and wear resistance of platinum/ruthenium/nitrogen doped diamond-like carbon thin films
چکیده انگلیسی

Platinum/ruthenium/nitrogen doped diamond-like carbon (PtRuN-DLC) thin films were deposited on conductive p-Si substrates using a DC magnetron sputtering deposition system by varying carbon sputtering power. The chemical composition, bonding structure, surface morphology and adhesion strength of the PtRuN-DLC films were investigated using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM), and micro-scratch test, respectively. The corrosion behavior of the PtRuN-DLC films in a 0.1 M NaCl solution was investigated using potentiodynamic polarization test. The corrosion results indicated that the corrosion resistance of the PtRuN-DLC films increased with increased carbon sputtering power probably due to decreased porosity level in the films with increased growth rate and film thickness. The wear performance of the PtRuN-DLC films was investigated with a ball-on-disc micro-tribometer. It was found that the increased carbon sputtering power significantly improved the wear performance of the films by enhancing the adhesion strength of the films.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 205, Issue 3, 25 October 2010, Pages 853–860
نویسندگان
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