Reactive co-sputter deposition of YSZ coatings using plasma emission monitoring

► Yttria-stabilised zirconia coatings are co-sputtered from metallic Zr and Y targets. ► A plasma emission monitoring system allows a high rate of codeposition. ► Metal-oxygen reactivity is studied to achieve the desired composition. ► Dense electrolyte coatings are deposited on anode porous substrates.